APEX : Applied Physics Express
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Home > JSAP OUTSTANDING PAPER AWARD — 2001

JSAP OUTSTANDING PAPER AWARD — 2001

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About JSAP Outstanding Paper Award
JSAP Paper Award
JSAP Young Scientist Award
Award for the Best Review Paper

AWARD FOR THE BEST REVIEW PAPER

  • Effects of Discharge Frequency in Plasma Etching and Ultrahigh-Frequency Plasma Source for High-Performance Etching for Ultralarge-Scale Integrated Circuits
    Seiji Samukawa, Vincent M. Donnelly, and Mikhail V. Malyshev
    Jpn. J. Appl. Phys. 39 (2000) 1583
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